Evaluation of β--SiC for sensors

J. S. Shor, D. Goldstein, A. D. Kurtz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

The sensor properties of n-type β-SiC, namely the gauge factor (GF) and temperature coefficient of resistivity (TCR), are reported over a wide range of temperatures. The maximum gauge factor observed was -31.8, which decreases to half its value over the temperature range 25-450°C. Unintentionally doped SiC has a constant TCR of 0.72%/°C over the range 25-800°C and exhibits full impurity ionization at room temperature. Low-resistivity, nitrogen doped SiC is fully ionized at 250°C, above which the resistance increases nonlinearly with temperature. It is shown that n-type β-SiC has a large strain sensitivity, making it a potentially useful high-temperature sensing element. The piezoresistive properties of SiC can be explained simply by intervalley electron transfer.

Original languageEnglish
Title of host publicationTransducers '91
PublisherPubl by IEEE
Pages912-915
Number of pages4
ISBN (Print)0879425857
StatePublished - 1991
Event1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
Duration: 24 Jun 199128 Jun 1991

Publication series

NameTransducers '91

Conference

Conference1991 International Conference on Solid-State Sensors and Actuators
CitySan Francisco, CA, USA
Period24/06/9128/06/91

Fingerprint

Dive into the research topics of 'Evaluation of β--SiC for sensors'. Together they form a unique fingerprint.

Cite this