Electroless Deposition of Silver Thin Films on Gold Nanoparticles for Micro and Nanoelectronics Applications

A Inberg, P Livshits, Z Zalevsky, Y Shacham-Diamand

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, the electroless deposition (ELD) of silver (Ag) thin films onto SiO2/Si surface modified by self-assembled monolayer (SAM) and activated by gold nanoparticles (AuNPs) has been studied. Experimental results clearly indicate the successful deposition of the films. Three distinct stages, such as compact and isolated islands, coalesce equilibrium shapes, and continuous hole-free films, during the growth of the Ag films, were observed by HRSEM imaging. Optical and electrical properties of the films were investigated, and their dependence on the coating structure was discussed. The application of small AuNPs as catalyst for successful metallization is proposed.
Original languageAmerican English
Title of host publication37th Micro and Nano Engineering Conference (MNE)
PublisherScienceDirect
StatePublished - 2012

Bibliographical note

Place of conference:Germany

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