Elastic deformations during phase transition in freestanding BaTiO3 thin films

Jaya P. Nair; Natalie Stavitski; Ilya Zon; Konstantin Gartsman; Igor Lubomirsky

doi:10.1557/proc-718-d12.5

Elastic deformations during phase transition in freestanding BaTiO₃ thin films

Jaya P. Nair, Natalie Stavitski, Ilya Zon, Konstantin Gartsman, Igor Lubomirsky

Weizmann Institute of Science

Research output: Contribution to journal › Conference article › peer-review

Abstract

Elastic deformations during phase transition in freestanding BaTiO₃ thin films were investigated. BaTiO₃ films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al₂O₃. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.

Original language	English
Pages (from-to)	245-250
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	718
DOIs	https://doi.org/10.1557/proc-718-d12.5
State	Published - 2002
Externally published	Yes
Event	Perovskite Materials - San Francisco, CA, United States Duration: 1 Apr 2002 → 5 Apr 2002

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abstract = "Elastic deformations during phase transition in freestanding BaTiO3 thin films were investigated. BaTiO3 films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al2O3. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.",

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AU - Nair, Jaya P.

AU - Stavitski, Natalie

AU - Zon, Ilya

AU - Gartsman, Konstantin

AU - Lubomirsky, Igor

PY - 2002

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N2 - Elastic deformations during phase transition in freestanding BaTiO3 thin films were investigated. BaTiO3 films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al2O3. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.

AB - Elastic deformations during phase transition in freestanding BaTiO3 thin films were investigated. BaTiO3 films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al2O3. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.

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Elastic deformations during phase transition in freestanding BaTiO₃ thin films

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