Dry etching to form submicron features in CMR oxides: (Pr,Ba,Ca)MnO3 and (La,Sr)MnO3

K. P. Lee, K. B. Jung, H. Cho, D. Kumar, S. V. Pietambaram, R. K. Singh, P. H. Hogan, K. H. Dahmen, Y. B. Hahn, S. J. Pearton

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Material Science