Dopant-selective etch stops in 6H and 3C SiC

Keyphrases

• Dopant 100%
• 6H-SiC 100%
• Selective Etch 100%
• 3C-SiC 100%
• Etch-stop 100%
• P-type 50%
• Photogeneration 50%
• Etching Process 50%
• Photoelectrochemical Etching 50%
• Via Hole 50%
• Selective Etching 50%
• Flat Band Potential 50%
• P-type 4H-SiC 50%
• Hole Current 50%
• Controlled Etching 50%
• Current Injection 50%
• Surface Dissolution 50%
• HF Solution 50%
• Multilayer Film 50%
• Precise Patterning 50%

Engineering

• Dopants 100%
• Etching Process 50%
• Selective Etching 50%
• Current Injection 50%
• Multilayer Film 50%

Material Science

• Doping (Additives) 100%
• Materials Class 100%
• Multilayer Film 50%