Abstract
We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ~0.2Vcm. Design consideration, fabrication process and experimental results will be presented.
| Original language | English |
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| Title of host publication | CLEO |
| Subtitle of host publication | Science and Innovations, CLEO_SI 2013 |
| Pages | CTu2F.4 |
| State | Published - 2013 |
| Externally published | Yes |
| Event | CLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States Duration: 9 Jun 2013 → 14 Jun 2013 |
Publication series
| Name | CLEO: Science and Innovations, CLEO_SI 2013 |
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Conference
| Conference | CLEO: Science and Innovations, CLEO_SI 2013 |
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| Country/Territory | United States |
| City | San Jose, CA |
| Period | 9/06/13 → 14/06/13 |