Design optimization and experimental demonstration of low VπL carrier-depletion silicon Mach-Zehnder modulator

Ilya Goykhman, Boris Desiatov, Shalva Ben-Ezra, Joseph Shappir, Uriel Levy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ∼0.2Vcm. Design consideration, fabrication process and experimental results will be presented.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
PublisherIEEE Computer Society
ISBN (Print)9781557529725
DOIs
StatePublished - 2013
Externally publishedYes
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: 9 Jun 201314 Jun 2013

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Conference

Conference2013 Conference on Lasers and Electro-Optics, CLEO 2013
Country/TerritoryUnited States
CitySan Jose, CA
Period9/06/1314/06/13

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