Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography

Uriel Levy; Boris Desiatov; Ilya Goykhman; Tali Nachmias; Avi Ohayon; Sheffer E. Meltzer

doi:10.1364/ol.35.000880

Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography

Uriel Levy, Boris Desiatov, Ilya Goykhman, Tali Nachmias, Avi Ohayon, Sheffer E. Meltzer

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.

Original language	English
Pages (from-to)	880-882
Number of pages	3
Journal	Optics Letters
Volume	35
Issue number	6
DOIs	https://doi.org/10.1364/ol.35.000880
State	Published - 15 Mar 2010
Externally published	Yes

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10.1364/ol.35.000880

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AU - Goykhman, Ilya

AU - Nachmias, Tali

AU - Ohayon, Avi

AU - Meltzer, Sheffer E.

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AB - We describe the design, fabrication, and experimental demonstration of a circular Dammann grating element generating a point-spread function of two concentric rings with equal intensity. The element was fabricated using grayscale lithography, providing a smooth and accurate phase profile. As a result, we obtained high diffraction efficiency and good uniformity between the two rings.

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Design, fabrication, and characterization of circular Dammann gratings based on grayscale lithography

Abstract

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