Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester

Bapi Debnath; R. Kumar

doi:10.1109/gucon48875.2020.9231097

Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester

Bapi Debnath, R. Kumar

National Institute of Technology Nagaland

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

The paper presents a MEMS energy harvester based on new two symmetrical Flared-U shaped unimorph spring structures which is capable to harvest energy from low frequency-based vibration. It comprises a silicon substrate beam integrated with Lead Zirconate Titanate (PZT-5H) piezoelectric material and a silicon proof mass. This device is designed and optimized utilizing COMSOL multiphysics 5.4 (licensed version). First natural frequency of the 28.6 Hz is observed by COMSOL simulation. Finite element method (FEM) simulator COMSOL Multiphysics based simulations shows that the proposed structure is able to extract 10.738 nW power from low resonant frequency of 28.6 Hz and low acceleration of 0.07 g over 120 mathrm{k}{Omega} load resistance.

Original language	English
Title of host publication	2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	101-105
Number of pages	5
ISBN (Electronic)	9781728150703
DOIs	https://doi.org/10.1109/gucon48875.2020.9231097
State	Published - 2 Oct 2020
Externally published	Yes
Event	2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020 - Greater Noida, India Duration: 2 Oct 2020 → 4 Oct 2020

Publication series

Name	2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020

Conference

Conference	2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020
Country/Territory	India
City	Greater Noida
Period	2/10/20 → 4/10/20

Bibliographical note

Publisher Copyright:
© 2020 IEEE.

Keywords

COMSOL
Energy harvester
FEM
Flared-U shaped
MEMS
PZT-5H
Piezoelectric
Resonant frequency

Access to Document

10.1109/gucon48875.2020.9231097

Cite this

Debnath, B., & Kumar, R. (2020). Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester. In 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020 (pp. 101-105). Article 9231097 (2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/gucon48875.2020.9231097

Debnath, Bapi ; Kumar, R. / Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester. 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 101-105 (2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020).

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abstract = "The paper presents a MEMS energy harvester based on new two symmetrical Flared-U shaped unimorph spring structures which is capable to harvest energy from low frequency-based vibration. It comprises a silicon substrate beam integrated with Lead Zirconate Titanate (PZT-5H) piezoelectric material and a silicon proof mass. This device is designed and optimized utilizing COMSOL multiphysics 5.4 (licensed version). First natural frequency of the 28.6 Hz is observed by COMSOL simulation. Finite element method (FEM) simulator COMSOL Multiphysics based simulations shows that the proposed structure is able to extract 10.738 nW power from low resonant frequency of 28.6 Hz and low acceleration of 0.07 g over 120 mathrm{k}{Omega} load resistance.",

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Debnath, B & Kumar, R 2020, Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester. in 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020., 9231097, 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020, Institute of Electrical and Electronics Engineers Inc., pp. 101-105, 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020, Greater Noida, India, 2/10/20. https://doi.org/10.1109/gucon48875.2020.9231097

Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester. / Debnath, Bapi; Kumar, R.
2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 101-105 9231097 (2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Debnath B, Kumar R. Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester. In 2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 101-105. 9231097. (2020 IEEE International Conference on Computing, Power and Communication Technologies, GUCON 2020). doi: 10.1109/gucon48875.2020.9231097

Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester

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Bibliographical note

Keywords

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