Abstract
We have deposited unhydrogenated diamond-like carbon (DLC) thin films by laser ablation of graphite, using a high power Ti: Sapphire solid state laser system. DLC films were deposited onto single crystal silicon substrates at room temperature with picosecond laser pulses, at peak power densities in the 5×1011 - 8×1012 W/cm2 range. A variety of techniques, including scanning and transmission electron microscopy (SEM and TEM), Raman spectroscopy, spectroscopic ellipsometry (SE), and electron energy loss spectroscopy (EELS) have been used to analyze the film quality. Smooth, partially transparent films were produced, distinct from the graphite target. Sp3 volume fractions were found to be in the 50 - 60% range, with optical bandgaps ranging from 0.6 to 1.2 eV, depending on the laser power density.
| Original language | English |
|---|---|
| Pages (from-to) | 615-620 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 354 |
| State | Published - 1995 |
| Externally published | Yes |
| Event | Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: 28 Nov 1994 → 2 Dec 1994 |