Complex metrology on 3D structures using multi-channel OCD
- Taher Kagalwala
- , Sridhar Mahendrakar
- , Alok Vaid
- , Paul K. Isbester
- , Aron Cepler
- , Charles Kang
- , Naren Yellai
- , Matthew Sendelbach
- , Mihael Ko
- , Ovadia Ilgayev
- , Yinon Katz
- , Lilach Tamam
- , Ilya Osherov
- Global Foundries, Inc.
- Nova Measuring Instruments, Inc.
- Nova Measuring Instruments
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations