Cl2-based dry etching of doped manganate perovskites: PrBaCaMnO3 and LaSrMnO3

K. P. Lee, K. B. Jung, H. Cho, D. Kumar, S. V. Pietambaram, R. K. Singh, P. H. Hogan, K. H. Dahmen, Y. B. Hahn, S. J. Pearton

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