Chemical Vapor Deposition of Spherical Amorphous Selenium Mie Resonators for Infrared Meta-Optics

Danveer Singh, Michal Poplinger, Avraham Twitto, Rafi Snitkoff, Pilkhaz Nanikashvili, Ori Azolay, Adi Levi, Chen Stern, Gili Cohen Taguri, Asaf Albo, Doron Naveh, Tomer Lewi

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


Applying direct growth and deposition of optical surfaces holds great promise for the advancement of future nanophotonic technologies. Here, we report on a chemical vapor deposition (CVD) technique for depositing amorphous selenium (a-Se) spheres by desorption of selenium from Bi2Se3 and re-adsorption on the substrate. We utilize this process to grow scalable, large area Se spheres on several substrates and characterize their Mie-resonant response in the mid-infrared (MIR) spectral range. We demonstrate size-tunable Mie resonances spanning the 2–16 μm spectral range for single isolated resonators and large area ensembles. We further demonstrate strong absorption dips of up to 90% in ensembles of particles in a broad MIR range. Finally, we show that ultra-high-Q resonances arise in the case where Se Mie-resonators are coupled to low-loss epsilon-near-zero (ENZ) substrates. These findings demonstrate the enabling potential of amorphous Selenium as a versatile and tunable nanophotonic material that may open up avenues for on-chip MIR spectroscopy, chemical sensing, spectral imaging, and large area metasurface fabrication.

Original languageEnglish
Pages (from-to)4612-4619
Number of pages8
JournalACS applied materials & interfaces
Issue number3
StatePublished - 26 Jan 2022

Bibliographical note

Funding Information:
T.L. would like to thank the Israel Science Foundation for funding this work under grant no. 2110/19; D.N. would like to thank the European Research Council for the generous funding of this work under the H2020 FET OPEN grant no. 801389.

Publisher Copyright:
© 2022 American Chemical Society


  • CVD growth
  • Mie-resonators
  • epsilon-near-zero
  • high-quality-factor resonances
  • meta-optics
  • nanoparticles
  • selenium


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