Chemical Vapor Deposition of Spherical Amorphous Selenium Mie Resonators for Infrared Meta-Optics

Danveer Singh, Michal Poplinger, Avraham Twitto, Rafi Snitkoff, Pilkhaz Nanikashvili, Ori Azolay, Adi Levi, Chen Stern, Gili Cohen Taguri, Asaf Albo, Doron Naveh, Tomer Lewi

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Applying direct growth and deposition of optical surfaces holds great promise for the advancement of future nanophotonic technologies. Here, we report on a chemical vapor deposition (CVD) technique for depositing amorphous selenium (a-Se) spheres by desorption of selenium from Bi2Se3 and re-adsorption on the substrate. We utilize this process to grow scalable, large area Se spheres on several substrates and characterize their Mie-resonant response in the mid-infrared (MIR) spectral range. We demonstrate size-tunable Mie resonances spanning the 2–16 μm spectral range for single isolated resonators and large area ensembles. We further demonstrate strong absorption dips of up to 90% in ensembles of particles in a broad MIR range. Finally, we show that ultra-high-Q resonances arise in the case where Se Mie-resonators are coupled to low-loss epsilon-near-zero (ENZ) substrates. These findings demonstrate the enabling potential of amorphous Selenium as a versatile and tunable nanophotonic material that may open up avenues for on-chip MIR spectroscopy, chemical sensing, spectral imaging, and large area metasurface fabrication.

Original languageEnglish
Pages (from-to)4612-4619
Number of pages8
JournalACS Applied Materials and Interfaces
Volume14
Issue number3
DOIs
StatePublished - 26 Jan 2022

Bibliographical note

Publisher Copyright:
© 2022 American Chemical Society

Funding

T.L. would like to thank the Israel Science Foundation for funding this work under grant no. 2110/19; D.N. would like to thank the European Research Council for the generous funding of this work under the H2020 FET OPEN grant no. 801389.

FundersFunder number
Horizon 2020 Framework Programme801389
European Commission
Israel Science Foundation2110/19

    Keywords

    • CVD growth
    • Mie-resonators
    • epsilon-near-zero
    • high-quality-factor resonances
    • meta-optics
    • nanoparticles
    • selenium

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