Characterization of monolithic n-type 6H-SiC piezoresistive sensing elements

J. Shor, Leala Bemis, Anthony D. Kurtz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageAmerican English
Title of host publicationFifth International Conference on SiC and Related Materials
StatePublished - 1993

Bibliographical note

Place of conference:USA

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