Built-in bias in Gd-doped ceria films and its implication for electromechanical actuation devices

Eran Mishuk; Andrei D. Ushakov; Sidney R. Cohen; Vladimir Ya Shur; Andrei L. Kholkin; Igor Lubomirsky

doi:10.1016/j.ssi.2018.10.012

Built-in bias in Gd-doped ceria films and its implication for electromechanical actuation devices

Eran Mishuk, Andrei D. Ushakov, Sidney R. Cohen, Vladimir Ya Shur, Andrei L. Kholkin, Igor Lubomirsky

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Electromechanical response of 1.5 μm thick 2 mm diameter self-supported films (membranes) of 20 mol% Gd-doped ceria with Ti electrodes was measured at two temperatures (25 and 75 °C) as a function of direct (U_DC) and alternating (U_AC, 20 Hz) voltages. The films assumed a soup-panbowl shape and application of the external voltage resulted in a uniform vertical shift of the flat area. In the absence of superimposed U_DC, U_AC induces electromechanical response at the 1st and 2nd harmonics at both temperatures. The amplitude of the 2nd harmonic is proportional to U_AC ² at these temperatures and it is independent of U_DC, which identifies it as due to the electrostriction effect. Direct measurement of the built-in bias via minimization of the 1st harmonic response, as well as electrical impedance and I–V measurements indicate that, although asymmetry of the contacts may contribute to the appearance of the 1st harmonic, it is insufficient to explain it. Based on the fact that the force-displacement curve of the membrane measured with AFM is hysteretic, we hypothesize that the 1st harmonic response is related to the non-linear mechanical deformation of the buckled film.

Original language	English
Pages (from-to)	47-51
Number of pages	5
Journal	Solid State Ionics
Volume	327
DOIs	https://doi.org/10.1016/j.ssi.2018.10.012
State	Published - 1 Dec 2018
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2018 Elsevier B.V.

Funding

This work was supported by the Israeli Ministry of Science and Technology within the program of Israel-Russian Federation Scientific Collaboration, grant # 12421-3 . This research is made possible in part by the historic generosity of the Harold Perlman Family. The equipment of the Ural Center for Shared Use “Modern Nanotechnology” of Ural Federal University was used. The research was made possible in part by RFBR (grant 15-52-06006 MNТI_a ). This work has been supported in part by the Ministry of Education and Science of the Russian Federation under projects nos. 3.9534.2017/BP and 3.4993.2017/6.7 and Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006). A.L.K. acknowledges the support of CICECO-Aveiro Institute of Materials (Ref. FCT UID/CTM/50011/2013) financed by national funds through the FCT/MEC and, when applicable, co-financed by FEDER under the PT2020 Partnership Agreement.

Funders	Funder number
CICECO-Aveiro Institute of Materials	FCT UID/CTM/50011/2013
Russian Foundation for Basic Research	15-52-06006 MNТI_a
Ministério da Educação e Ciência
Ministry of Education and Science of the Russian Federation	3.9534.2017/BP, 3.4993.2017/6.7
Ministry of science and technology, Israel	12421-3
European Regional Development Fund
Government Council on Grants, Russian Federation

Keywords

Electromechanics
Electrostriction
Gd-doped ceria
MEMS
Membranes

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title = "Built-in bias in Gd-doped ceria films and its implication for electromechanical actuation devices",

abstract = "Electromechanical response of 1.5 μm thick 2 mm diameter self-supported films (membranes) of 20 mol% Gd-doped ceria with Ti electrodes was measured at two temperatures (25 and 75 °C) as a function of direct (UDC) and alternating (UAC, 20 Hz) voltages. The films assumed a soup-panbowl shape and application of the external voltage resulted in a uniform vertical shift of the flat area. In the absence of superimposed UDC, UAC induces electromechanical response at the 1st and 2nd harmonics at both temperatures. The amplitude of the 2nd harmonic is proportional to UAC 2 at these temperatures and it is independent of UDC, which identifies it as due to the electrostriction effect. Direct measurement of the built-in bias via minimization of the 1st harmonic response, as well as electrical impedance and I–V measurements indicate that, although asymmetry of the contacts may contribute to the appearance of the 1st harmonic, it is insufficient to explain it. Based on the fact that the force-displacement curve of the membrane measured with AFM is hysteretic, we hypothesize that the 1st harmonic response is related to the non-linear mechanical deformation of the buckled film.",

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Built-in bias in Gd-doped ceria films and its implication for electromechanical actuation devices

Abstract

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Keywords

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