Abstract
The mechanical and chemical processes occurring in undoped nanocrystalline CeO2 membranes due to order-disorder transition of oxygen vacancies were analyzed. 1.5±0.2 μm thick CeO2 films were deposited by radio frequency (RF) magnetron plasma sputtering on silicon. The nanocrystalline membranes were studied using x-ray diffraction analysis (XRD) and scanning electron microscopy (SEM). It was found that the order-disorder transition led to a large lateral expansion and buckling of the membranes.
Original language | English |
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Pages (from-to) | 2077-2081 |
Number of pages | 5 |
Journal | Advanced Materials |
Volume | 15 |
Issue number | 24 |
DOIs | |
State | Published - 17 Dec 2003 |
Externally published | Yes |