Annealing-Free Ohmic Contacts to n-Type GaN via Hydrogen Plasma-Assisted Atomic Layer Deposition of Sub-Nanometer AlOx

  • Maximilian Christis
  • , Alex Henning
  • , Johannes D. Bartl
  • , Andreas Zeidler
  • , Bernhard Rieger
  • , Martin Stutzmann
  • , Ian D. Sharp

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

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Chemical Engineering