Angular and velocity distributions of tungsten sputtered by low energy argon ions
- E. Marenkov
- , K. Nordlund
- , I. Sorokin
- , A. Eksaeva
- , K. Gutorov
- , J. Jussila
- , F. Granberg
- , D. Borodin
- Moscow Engineering Physics Institute
- University of Helsinki
- RAS - Kotelnikov Institute of Radio Engineering and Electronics
- Jülich Research Centre
Research output: Contribution to journal › Article › peer-review
24
Scopus
citations