Acquisition of EELS spectra for high-resolution spectroscopy

Maoxu Qian, Mehmet Sarikaya, Edward A. Stern

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations


In the spectrum acquisition with EELS in the TEM, there are limitations in achieving high signal to noise ratio with high overall counts and enough energy resolution requirements. These are large intrinsic background in EELS spectra, channel to channel gain variation (CCGV) in the parallel detection system and difficulties in obtaining statistically high total counts. CCGV and total counts can be corrected and the S/N ratio may be improved by on-line acquisition procedures. The procedures in correcting and improving the limitations will be discussed in this article.

Original languageEnglish
Pages (from-to)578-579
Number of pages2
JournalProceedings - Annual Meeting, Microscopy Society of America
StatePublished - 1993
Externally publishedYes
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: 1 Aug 19936 Aug 1993


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