Accurate Shielded Interconnect Delay Estimation by Reconfigurable Ring Oscillator

Shielding, which is used in VLSI designs to prevent noise interference from the cross-coupling capacitance between adjacent signals can also be used to tune the propagation delay of the clock signals in designs operating at low GHz frequencies. This paper presents a detailed design for a 16-nm ring oscillator with built-in reconfigurable shielding, and a delay estimation methodology. Together these provide a post-silicon measurement methodology that can derive accurate shielding delays without any direct delay measurements. The shielded ring oscillator and the testing methodology are designed to minimize the effects of on-die variations on estimation accuracy. Comparisons of the estimated delays with SPICE simulations show very good fit across process technology corners. The circuit was fabricated in 16-nm technology. The accuracy and robustness of the estimation methodology were verified by cross-validation, obtained from both pre and post-silicon measurements.