A simple system for on-die measurement of atto-Farad capacitance

Ezra Baruch, Shai Shperber, Rinatya Levy, Yoav Weizman, Jacob Fridburg, Rachel Marks

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

Charge Injection Error Free (CIEF) Charge-Base Capacitance Measurement (CBCM) technique provides a simple way for accurate measurements of on-chip interconnect parasitic capacitance. We report here for the first time capacitance measurements of on-chip interconnect with resolution values of 1aF or better. We analyze the setup requirements to allow such capability, and show stable coupling capacitance measurement results at the 1aF resolution.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings
Pages19-21
Number of pages3
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011 - Amsterdam, Netherlands
Duration: 4 Apr 20117 Apr 2011

Publication series

NameIEEE International Conference on Microelectronic Test Structures

Conference

Conference2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011
Country/TerritoryNetherlands
CityAmsterdam
Period4/04/117/04/11

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