TY - GEN
T1 - A simple system for on-die measurement of atto-Farad capacitance
AU - Baruch, Ezra
AU - Shperber, Shai
AU - Levy, Rinatya
AU - Weizman, Yoav
AU - Fridburg, Jacob
AU - Marks, Rachel
PY - 2011
Y1 - 2011
N2 - Charge Injection Error Free (CIEF) Charge-Base Capacitance Measurement (CBCM) technique provides a simple way for accurate measurements of on-chip interconnect parasitic capacitance. We report here for the first time capacitance measurements of on-chip interconnect with resolution values of 1aF or better. We analyze the setup requirements to allow such capability, and show stable coupling capacitance measurement results at the 1aF resolution.
AB - Charge Injection Error Free (CIEF) Charge-Base Capacitance Measurement (CBCM) technique provides a simple way for accurate measurements of on-chip interconnect parasitic capacitance. We report here for the first time capacitance measurements of on-chip interconnect with resolution values of 1aF or better. We analyze the setup requirements to allow such capability, and show stable coupling capacitance measurement results at the 1aF resolution.
UR - http://www.scopus.com/inward/record.url?scp=80052422765&partnerID=8YFLogxK
U2 - 10.1109/icmts.2011.5976854
DO - 10.1109/icmts.2011.5976854
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AN - SCOPUS:80052422765
SN - 9781424485277
T3 - IEEE International Conference on Microelectronic Test Structures
SP - 19
EP - 21
BT - 2011 IEEE International Conference on Microelectronic Test Structures - 24th ICMTS Conference Proceedings
T2 - 2011 24th IEEE International Conference on Microelectronic Test Structures, ICMTS 2011
Y2 - 4 April 2011 through 7 April 2011
ER -