A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning

Original language	English
State	Published - 2014
Event	4th international Nanotechnology Conference, NanoIsrael - Tel Aviv, Israel Duration: 24 Mar 2014 → 25 Mar 2014

Conference

Conference	4th international Nanotechnology Conference, NanoIsrael
Country/Territory	Israel
City	Tel Aviv
Period	24/03/14 → 25/03/14

Activities

• 1 Organizing a conference, workshop, ...

Activities per year

• 4th international Nanotechnology Conference, NanoIsrael

  Sharoni, A. (Participation - Conference participant)

  24 Mar 2014 → 25 Mar 2014

  Activity: Participating in or organizing an event › Organizing a conference, workshop, ...

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Yamin, T., Havdala, T., & Sharoni, A. (2014). A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning. Paper presented at 4th international Nanotechnology Conference, NanoIsrael, Tel Aviv, Israel.

Yamin, T ; Havdala, T ; Sharoni, A. / A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning. Paper presented at 4th international Nanotechnology Conference, NanoIsrael, Tel Aviv, Israel.

@conference{3ece84a6d8854ad2b8378f8521f04b94,

title = "A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning",

author = "T Yamin and T Havdala and A. Sharoni",

year = "2014",

language = "אנגלית",

note = "4th international Nanotechnology Conference, NanoIsrael ; Conference date: 24-03-2014 Through 25-03-2014",

}

Yamin, T, Havdala, T & Sharoni, A 2014, 'A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning', Paper presented at 4th international Nanotechnology Conference, NanoIsrael, Tel Aviv, Israel, 24/03/14 - 25/03/14.

A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning. / Yamin, T; Havdala, T; Sharoni, A.
2014. Paper presented at 4th international Nanotechnology Conference, NanoIsrael, Tel Aviv, Israel.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning

AU - Yamin, T

AU - Havdala, T

AU - Sharoni, A.

PY - 2014

Y1 - 2014

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T2 - 4th international Nanotechnology Conference, NanoIsrael

Y2 - 24 March 2014 through 25 March 2014

ER -

Yamin T, Havdala T, Sharoni A. A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning. 2014. Paper presented at 4th international Nanotechnology Conference, NanoIsrael, Tel Aviv, Israel.