A Novel Micro-Lithography Lift-off Process for Epitaxial VO2 Deposition and Patterning

T Yamin, T Havdala, A. Sharoni

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
StatePublished - 2014
Event4th international Nanotechnology Conference, NanoIsrael - Tel Aviv, Israel
Duration: 24 Mar 201425 Mar 2014

Conference

Conference4th international Nanotechnology Conference, NanoIsrael
Country/TerritoryIsrael
CityTel Aviv
Period24/03/1425/03/14

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