Abstract
A new architecture of an on-die process monitor circuit is demonstrated in 28 nm. The proposed circuit can extract the threshold voltage, VTH and random mismatch of a transistor using multiple extraction methods, including the second derivative method. A sigma-delta modulator analog-to-digital converter samples the output to enable on-die processing of the results. A VDS voltage control loop enables VTH extraction in both the linear and saturation regions of the device.
Original language | English |
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Pages (from-to) | 279-282 |
Number of pages | 4 |
Journal | IEEE Solid-State Circuits Letters |
Volume | 7 |
DOIs | |
State | Published - 2024 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- Process monitor (PM)
- sensors
- switched capacitor
- threshold voltage extractor