A Fully Integrated 5510-μm2 Process Monitor and Threshold Voltage Extractor Circuit in 28 nm

Ido Shpernat, Asaf Feldman, Joseph Shor

Research output: Contribution to journalArticlepeer-review

Abstract

A new architecture of an on-die process monitor circuit is demonstrated in 28 nm. The proposed circuit can extract the threshold voltage, VTH and random mismatch of a transistor using multiple extraction methods, including the second derivative method. A sigma-delta modulator analog-to-digital converter samples the output to enable on-die processing of the results. A VDS voltage control loop enables VTH extraction in both the linear and saturation regions of the device.

Original languageEnglish
Pages (from-to)279-282
Number of pages4
JournalIEEE Solid-State Circuits Letters
Volume7
DOIs
StatePublished - 2024

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

Keywords

  • Process monitor (PM)
  • sensors
  • switched capacitor
  • threshold voltage extractor

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