Abstract
A new architecture of an on-die process monitor circuit is demonstrated in 28nm. The proposed circuit can extract the threshold voltage, VTH, and random mismatch of a transistor using multiple extraction methods including the second derivative method. A sigma-delta modulator analog-to-digital converter samples the output to enable on-die processing of the results. A VDS voltage control loop enables VTH extraction in both the linear and saturation regions of the device. The circuit has a compact area of 5510 μm2.
Original language | English |
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Journal | IEEE Solid-State Circuits Letters |
DOIs | |
State | Accepted/In press - 2024 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- Process Monitor
- Sensors
- Switched Capacitor
- Threshold Voltage Extractor