A Fully Integrated 5510 μm2 Process Monitor and Threshold Voltage Extractor Circuit in 28nm

Ido Shpernat, Asaf Feldman, Joseph Shor

Research output: Contribution to journalArticlepeer-review

Abstract

A new architecture of an on-die process monitor circuit is demonstrated in 28nm. The proposed circuit can extract the threshold voltage, VTH, and random mismatch of a transistor using multiple extraction methods including the second derivative method. A sigma-delta modulator analog-to-digital converter samples the output to enable on-die processing of the results. A VDS voltage control loop enables VTH extraction in both the linear and saturation regions of the device. The circuit has a compact area of 5510 μm2.

Original languageEnglish
JournalIEEE Solid-State Circuits Letters
DOIs
StateAccepted/In press - 2024

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

Keywords

  • Process Monitor
  • Sensors
  • Switched Capacitor
  • Threshold Voltage Extractor

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