A 700-µm2, Ring-Oscillator-Based Thermal Sensor in 16-nm FinFET

Yosef Lempel, Rinat Breuer, Joseph Shor

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Temperature monitoring and regulation is a critical power/performance feature in microprocessors. Due to the multiplicity of hotspots, a large number of on-die sensors are utilized. This requires them to be highly compact, low energy and fast. A miniaturized current controlled oscillator (CCO) sensor is described for this application. It has an area of only 700 μ m2 in the 16-nm FinFET process, with an energy consumption of 0.25 nJ in a 6.9- μ s conversion. The inaccuracy is within ±1.5 °C peak-to-peak (p-p) over a 130 °C range, at a resolution of 0.32 °C. These characteristics make the circuit attractive for high-density thermal sensing.

Original languageEnglish
Pages (from-to)248-252
Number of pages5
JournalIEEE Transactions on Very Large Scale Integration (VLSI) Systems
Volume30
Issue number2
DOIs
StatePublished - 1 Feb 2022

Bibliographical note

Publisher Copyright:
© 1993-2012 IEEE.

Keywords

  • CMOS
  • microprocessors
  • ring oscillator
  • thermal sensor

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