3D printing of functional metallic microstructures and its implementation in electrothermal actuators

O. Fogel; S. Winter; E. Benjamin; S. Krylov; Z. Kotler; Z. Zalevsky

doi:10.1016/j.addma.2018.03.018

3D printing of functional metallic microstructures and its implementation in electrothermal actuators

O. Fogel, S. Winter, E. Benjamin, S. Krylov, Z. Kotler, Z. Zalevsky

Bar-Ilan University - The Alexander Kofkin Faculty of Engineering

Research output: Contribution to journal › Article › peer-review

29 Scopus citations

Abstract

Laser-induced forward transfer (LIFT), a 3D Pleaadditive manufacturing technique is implemented to fabricate a fully metallic functional micro device. Digital deposition of both structural and sacrificial metal constituents in the same setup arrangement is achieved. The final free-standing structure is released by selective chemical wet etching of the support material. Using this approach, a chevron-type electro thermal micro-actuator made of gold was successfully fabricated and its functionality was shown in experiment. Comparison of the measured responses with the model predictions indicates that the thermal conductivity of printed Au is approximately 8 times lower than the bulk value. It is a first demonstration of a functional micron scale actuator printed using LIFT.

Original language	English
Pages (from-to)	307-311
Number of pages	5
Journal	Additive Manufacturing
Volume	21
DOIs	https://doi.org/10.1016/j.addma.2018.03.018
State	Published - May 2018

Bibliographical note

Publisher Copyright:
© 2018 Elsevier B.V.

Funding

This project has received funding from the IIA − Israel Innovation Authority ; Project No. 51697, “Micrometer scale, 3D Functional Printing”. The fourth author acknowledges support from the Henry and Dinah Krongold Chair of Microelectronics.

Funders	Funder number
IIA − Israel Innovation Authority	51697

Keywords

3D printing
LIFT
Laser induced forward transfer
MEMS
Thermal actuator

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10.1016/j.addma.2018.03.018

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abstract = "Laser-induced forward transfer (LIFT), a 3D Pleaadditive manufacturing technique is implemented to fabricate a fully metallic functional micro device. Digital deposition of both structural and sacrificial metal constituents in the same setup arrangement is achieved. The final free-standing structure is released by selective chemical wet etching of the support material. Using this approach, a chevron-type electro thermal micro-actuator made of gold was successfully fabricated and its functionality was shown in experiment. Comparison of the measured responses with the model predictions indicates that the thermal conductivity of printed Au is approximately 8 times lower than the bulk value. It is a first demonstration of a functional micron scale actuator printed using LIFT.",

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3D printing of functional metallic microstructures and its implementation in electrothermal actuators

Abstract

Bibliographical note

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Keywords

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