Silicon-photonic integrated circuits are a pivotal technology for the continued growth of data communications. A main task of silicon photonics is the wavelength division multiplexing of communication channels to aggregate bandwidths that exceed the working rates available in electronics. In this work, we design and implement a 16-channel, wavelength division multiplexing device in silicon-on-insulator. The device operates at the O-band wavelengths, centered at 1310 nm, which are favored by many data center applications. The spacing between adjacent channels is 0.96 nm (167 GHz), close to those of dense wavelength division multiplexing standards in the 1550 nm wavelength range (C band). The layout consists of 15 Mach-Zehnder interferometers, cascaded in a four-stage tree topology. The differential phase delay within each interferometer is precisely trimmed post-fabrication, through local illumination of a photosensitive upper cladding layer of As2Se3 chalcogenide glass. Trimming is performed subject to closed-loop feedback of transfer functions measurements. The devices can be useful in data center optical communications.
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