Equipments Details
Description
LEXT 3D optical profiler use laser scanning confocal microscopy for high resolution 3D scanning.
Confocal laser scanning microscopes allow for observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scaning head for both direct imaging of the surface and for surface profile measurements.
Specifications:
- Magnification 108X-17280X
- X-Y Resolution: 0.12µm
- Z Resolution: 10 nm
- XY stage movement: 100x100 mm
Contact Person:
Mark Oksman
https://nano.biu.ac.il/oksman
Confocal laser scanning microscopes allow for observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scaning head for both direct imaging of the surface and for surface profile measurements.
Specifications:
- Magnification 108X-17280X
- X-Y Resolution: 0.12µm
- Z Resolution: 10 nm
- XY stage movement: 100x100 mm
Contact Person:
Mark Oksman
https://nano.biu.ac.il/oksman
Details
| Name | LEXT OLS4100 |
|---|---|
| Manufacturers | Olympus Life Science |
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