LEXT 3D Laser Scanning Confocal Microscope [Olympus LEXT OLS4100]

  • Mark Oksman (Manager)

Equipment/facility: Equipment

    Equipments Details


    LEXT 3D optical profiler use laser scanning confocal microscopy for high resolution 3D scanning.

    Confocal laser scanning microscopes allow for observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scaning head for both direct imaging of the surface and for surface profile measurements.


    - Magnification 108X-17280X
    - X-Y Resolution: 0.12┬Ám
    - Z Resolution: 10 nm
    - XY stage movement: 100x100 mm

    Contact Person:
    Mark Oksman


    NameLEXT OLS4100
    ManufacturersOlympus Life Science


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