FIB (Focused Ion Beam), dual beam FEI, Helios NanoLab 5UC

  • Olga Girshevitz (Manager)

Equipment/facility: Equipment

    Equipments Details


    The Helios 5UC is a dual beam instrument combining scanning electron beam (SEM) and Focused Ion Beam (FIB) technologies as well as gas chemistries, different detectors and manipulators. Various applications with nano to micro scale resolution can be performed using the FIB for patterning, milling, cross section, materials deposition, High Resolution SEM imaging, 3D Imaging, EDS, Cryo cut & imaging.

    • Dual beam FIB • TEM sample preparation • Cross section • Failure analysis • Patterning • Micro probing
    E-Beam resolution- 0.6nm
    Ion-Beam resolution- 2.5nm
    Detectors- TLD, ICD, MD, ETD, ICE, STEM, EDS
    Chemical deposition- W, C, SiO
    Chemical etcher- XeF2
    Cross section
    High quality TEM sample preparation
    3D imaging
    Failure analysis
    Cryo cut & imaging


    NameHelios 5 UC DualBeam for Materials Science
    ManufacturersThermo Fisher Scientific, Inc.


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