Equipments Details
Description
Our Nanofabrication Unit is a state-of-the-art cleanroom facility for interdisciplinary research in nanoscience and applied nanotechnology. The Nanofabrication Unit is designed for the fabrication of sub-micron devices and nano devices and has a 152-meter square cleanroom of class 100 and class 1000 equipped with a full suite of tools supporting device fabrication and characterization.
The Unit provides service to all BINA research groups in applications, ranging from biology, chemistry, engineering and physics.
The center also provides services to external groups from the industry and other academic centers.
The Unit facilities include:
Lithography
Deposition
Physical Vapor Deposition (PVD)
Etching
Metrology
Additional tools
We welcome researchers from all disciplines and faculties to use the available tools at the Unit.
The Unit provides service to all BINA research groups in applications, ranging from biology, chemistry, engineering and physics.
The center also provides services to external groups from the industry and other academic centers.
The Unit facilities include:
Lithography
Deposition
Physical Vapor Deposition (PVD)
Etching
Metrology
Additional tools
We welcome researchers from all disciplines and faculties to use the available tools at the Unit.
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