Keyphrases
Electron Beam Lithography
100%
Electronic Devices
100%
Accelerating Voltage
100%
Electron Beam
100%
Beamwidth
50%
Pattern Features
50%
Sub-10 Nm
50%
Current Intensity
50%
Pre-alignment
50%
Nanostructured Devices
50%
Direct Writing Technique
50%
Vector Scan
50%
Beam Sensitive
50%
Optical Devices
50%
Spot Beam
50%
Metamaterials
50%
Gaussian Spot
50%
MScan
50%
G100
50%
Photonic Devices
50%
Superconductor
50%
Semiconductors
50%
Mechanism Study
50%
Transport Mechanism
50%
Quantum Structures
50%
Micro-electro-mechanical Systems
50%
Electron Acceleration
50%
Submicron
50%
Engineering
Transport Mechanism
100%
Gaussians
100%
Photonic Devices
100%
Microelectromechanical System
100%
Optoelectronic Device
100%
Direct-Writing
100%
Electron Optical Lithography
100%
Superconductor
100%
Physics
Optical Device
100%
Quantum Structure
50%
Microelectromechanical System
50%
Optoelectronic Device
50%
Metamaterial
50%
Gaussian Distribution
50%
Electron Beam
50%