Dual Beam (FIB), Helios 5UC

  • Olga Girshevitz (Manager)

Equipment/facility: Equipment

    Equipments Details

    Description

    The Helios 5UC is a dual beam instrument combining scanning electron beam (SEM) and Focused Ion Beam (FIB) technologies as well as gas chemistries, different detectors and manipulators. Various applications with nano to micro scale resolution can be performed using the FIB for patterning, milling, cross section, materials deposition, High Resolution SEM imaging, 3D Imaging, EDS, Cryo cut & imaging.

    Specifications
    E-Beam resolution- 0.6nm
    Ion-Beam resolution- 2.5nm
    Detectors- TLD, ICD, MD, ETD, ICE, STEM, EDS
    Chemical deposition- W, C, SiO
    Chemical etcher- XeF2
    Cross section
    High quality TEM sample preparation
    3D imaging
    Patterning
    Failure analysis
    Cryo cut & imaging

    Fingerprint

    Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.