Equipments Details
Description
A 152-meter square cleanroom of class 100 and class 1000 equipped with a full suite of tools supporting device fabrication and characterization.
Specifications:
Clean Rooms
Class 100 Yellow room for lithography
Class 1000 White rooms for etch and deposition
Working stations
Wet Bench for cleaning, spinning, developing and etch
Chemical hoods
Spinners, Oven & Hot Plates
Cleaning and Activation
Ultra sonic tanks (freq + puls)
Plasma chamber for cleaner and activation with 3 gases (O2, Ar, N2)
UV cleaner + ozone generator
Contact Person:
Moshe Feldberg
https://nano.biu.ac.il/feldberg
Specifications:
Clean Rooms
Class 100 Yellow room for lithography
Class 1000 White rooms for etch and deposition
Working stations
Wet Bench for cleaning, spinning, developing and etch
Chemical hoods
Spinners, Oven & Hot Plates
Cleaning and Activation
Ultra sonic tanks (freq + puls)
Plasma chamber for cleaner and activation with 3 gases (O2, Ar, N2)
UV cleaner + ozone generator
Contact Person:
Moshe Feldberg
https://nano.biu.ac.il/feldberg
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